P9B - 1/18

© 2012-2018 MKS Instruments, Inc.

All rights reserved.

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA.

trademark of the Open DeviceNet Vendor Association, Coral Springs, FL.

6

0

013

30

502

C

P9B

* The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate

separated by a decimal point. The third digit is the exponent of the power of ten.

Example flow rate code:

Ordering Information

T

Ordering Code Example: P9B013502C6T030

Code

Configuration

MFC Mass Flow Controller (Pressure insensitive, multigas, multi-range), P9B

P9B

Gas (Per Semi Standard E52-0703)

For example:

013 = Nitrogen = N

2

013

029 = Ammonia = NH

3

029

110 = Sulfur Hexafluoride = SF

6

110

Flow Range Full Scale*

5 sccm

500

10 sccm

101

20 sccm

201

50 sccm

501

100 sccm

102

200 sccm

202

500 sccm

502

1000 sccm

103

2000 sccm

203

5000 sccm

503

10000 sccm

104

20000 sccm

204

30000 sccm

304

50000 sccm

504

Fittings (compatible with)

Swagelok 4 VCR

R

C-seal (1.125”)

C

W-seal (1.125”)

H

W-seal (1.5”)

F

Connector

DeviceNet

6

RS485 (uses 9 pin connector)

5

15 pin D (Analog I/O)

B

9 pin D (Analog I/O)

A

Valve

T

Normally Open, Teflon: (5 sccm to 50 slm N

P

No valve (MFM)

0

Reserved for MKS Future Use

Standard

0

Firmware

Unless otherwise specified, MKS will ship firmware revision current to date

30

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Flow Solutions

Six Shattuck Road

Andover, MA 01810

Tel:

978.975.2350