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AT89C51ED2-RDTIM Fiches technique(PDF) 4 Page - ATMEL Corporation

No de pièce AT89C51ED2-RDTIM
Description  8-bit Flash Microcontroller
PDF  24 Pages
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Fabricant  ATMEL [ATMEL Corporation]
Site Internet  http://www.atmel.com
Logo ATMEL - ATMEL Corporation

AT89C51ED2-RDTIM Fiches technique(HTML) 4 Page - ATMEL Corporation

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AT89C51RD2 / AT89C51ED2 QualPack
4
Rev. 0 – 2003 July
3 Technology Information
3.1 Wafer Process Technology
Process Type (Name):
Logic 0.35um with embedded FLASH (AT56800)
Base Material:
Epitaxied Silicon
Wafer Thickness (final)
475 um
Wafer Diameter
150 mm
Number Of Masks
27
Gate Oxide (Logic transistors)
Material
Silicon Dioxide
Thickness
68A
Gate Oxide (EPROM cell)
Material
Silicon Dioxide
Thickness
390A
Polysilicon
Number of Layers
2
Thickness Poly 1
1400A Amorphous
Thickness Poly 2
3200A
Metal
Number of Layers
3
Material:
Aluminum Copper
Layer 1 Thickness
5000A
Layer 2 Thickness
5000A
Layer 3 Thickness
8000A
Passivation
Material
Oxide HDP/ Oxy-nitride
Thickness
21000A



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