Output Characteristics

Bidirectional Dust Segregation System

The D6F-P series has a patented dust segregation design. The flow path incorporates dual centrifugal

chambers, in which particulate matter follows in the outer path, away from the MEMS sensor chip

regardless of the flow direction. Note, standard products are calibrated for unidirectional flow, as shown

above. Contact Omron for bidirectional calibration options.

sensing element

0.0

0.5

1.0

1.5

2.0

2.5

3.0

0.0

0.2

0.4

0.6

0.8

1.0

Differential Pressure (inH2O)

Differential

Pressure

Flow Rate

Output

(inH2O)

(SLM)

(V)

0.00

0.00

0.50

0.07

0.25

1.60

0.24

0.50

2.10

0.51

0.75

2.31

0.84

1.00

2.50

2

MEMS Mass Flow Sensor

D6F-P

Mass flow converted into volumetric flow rate

SLM (standard liters per minute) at 0

°C, 1 atm.

Note, 0 to 0.5V output indicates a negative flow

direction.

Repeatability, typical test results

-

0.5

1.0

1.5

2.0

2.5

3.0

0.00

0.25

0.50

0.75

1.00

FLOW RATE [LPM ]

(output results of 34 samples)

-1.0

-0.8

-0.6

-0.4

-0.2

0.0

0.2

0.4

0.6

0.8

1.0

0.0

0.3

0.5

0.8

1.0

Flow Rate [LPM] (5 samples, repeated 10 times each)