FEATURES
❏ Micro flow rate measurement
Can measure flow rates from 0.15 to 1.5 mL/min (nor) to 6 to 60 L/
min (nor)
❏ Easy flow rate control
Can control flow rates accurately. The optimum valve will be provided
for your specification of inlet and outlet pressures.
❏ Selectable face-to-face dimensions
Three face-to-face dimensions (115 mm, 130 mm, and 145 mm) are
available for various applications.
❏ Compact, lightweight design
3 mm smaller in width and half the weight compared with the P-810.
MAJOR APPLICATIONS
1. Built-in use for equipment
2. Biotechnology industry
3. Semiconductor-related gas equipment